Inkqubela phambili yophando lwefilimu ebhityileyo ye-lithium niobate electro-optic modulator

Inkqubela yophando yeifilimu encinci ye-lithium niobate imodyuli ye-electro-optic

Imodyuli ye-Electro-optic sesona sixhobo siphambili senkqubo yonxibelelwano lwamehlo kunye nenkqubo yefoto ye-microwave. Ilawula ukukhanya okusasazeka kwindawo yamahhala okanye i-waveguide optical ngokutshintsha isalathisi se-refractive sezinto ezibangelwa yintsimi yombane esetyenzisiweyo. I-lithium niobate yemveliimodyuli ye-electro-opticalisebenzisa izinto ezininzi ze-lithium niobate njengezinto ze-electro-optical. Isixhobo esisodwa se-crystal lithium niobate sifakwe kwindawo ukuze yenze i-waveguide ngokusebenzisa i-titanium diffusion okanye inkqubo yokutshintshiselana kweproton. Umahluko wesalathiso se-refractive phakathi kwe-core layer kunye ne-cladding layer incinci kakhulu, kwaye i-waveguide inamandla okubophelela okungalunganga kwibala lokukhanya. Ubude obupheleleyo bemodyuli ye-electro-optic epakishweyo idla ngokuba yi-5 ~ 10 cm.

I-Lithium Niobate kwi-Insulator (LNOI) iteknoloji inikeza indlela efanelekileyo yokusombulula ingxaki yobukhulu obukhulu be-lithium niobate electro-optic modulator. Umahluko wesalathiso se-refractive phakathi kwe-waveguide core layer kunye ne-cladding layer ifikelela kwi-0.7, ephucula kakhulu i-optical mode yokubopha isakhono kunye ne-electro-optical regulation effect ye-waveguide, kwaye ibe yindawo yophando kwintsimi ye-electro-optical modulator.

Ngenxa yenkqubela phambili yetekhnoloji ye-micro-machining, uphuhliso lweemodyuli ze-electro-optic ezisekelwe kwiqonga le-LNOI lenze inkqubela phambili ekhawulezayo, ebonisa umkhwa wobungakanani obuncinci kunye nokuphuculwa okuqhubekayo kokusebenza. Ngokwesakhiwo se-waveguide esisetyenzisiweyo, iimodyuli zefilimu ezicekethekileyo ze-lithium niobate electro-optic zifakwe ngokuthe ngqo kwi-waveguide electro-optic modulators, elayishiweyo hybrid.iimodyuli ze-waveguidekunye ne-silicon ehlanganisiweyo ye-waveguide electro-optic modulators.

Okwangoku, uphuculo lwenkqubo yokuchopha okomileyo kunciphisa kakhulu ilahleko yefilimu ebhityileyo ye-lithium niobate waveguide, indlela yokulayisha i-ridge isombulula ingxaki yobunzima benkqubo yokuchopha okuphezulu, kwaye uye waqaphela imodyuli ye-lithium niobate ye-electro-optic ene-voltage engaphantsi kwe-1 V isiqingatha samaza, kunye nokudityaniswa nobuchwephesha be-SOI obuqolileyo buthobela umkhwa wokuhlanganiswa kwefoton kunye ne-electron. Ifilimu encinci ye-lithium niobate iteknoloji ineenzuzo ekuqondeni ilahleko ephantsi, ubungakanani obuncinci kunye ne-bandwidth enkulu edibeneyo ye-electro-optic modulator kwi-chip. Ngokwethiyori, kuqikelelwa ukuba ifilimu ye-3mm encinci ye-lithium niobate push-pullImodyuli ye-M⁃ZI-3dB i-electro-optical bandwidth inokufikelela kwi-400 GHz, kwaye i-bandwidth ye-module ye-lithium niobate ecetywayo elungiselelwe ngokuvavanywayo iye yaxelwa ukuba ingaphezulu nje kwe-100 GHz, esekude kumda wethiyori ophezulu. Uphuculo oluziswe ngokwandisa iiparamitha ezisisiseko zolwakhiwo lulinganiselwe. Kwixesha elizayo, ngokwembono yokuphonononga iindlela ezintsha kunye nezakhiwo, ezinjengokuyila i-electrode ye-coplanar waveguide esemgangathweni njenge-electrode ye-microwave ecandiweyo, ukusebenza kwemodyuli kunokuphuculwa ngakumbi.

Ukongeza, ukufezekiswa kokupakishwa kwe-chip ye-modulator edibeneyo kunye ne-on-chip heterogeneous integration kunye ne-lasers, i-detectors kunye nezinye izixhobo zombini ziyithuba kunye nomngeni wophuhliso lwexesha elizayo lweemodyuli zefilimu ezinqabileyo ze-lithium niobate. Ifilimu encinci ye-lithium niobate imodyuli ye-electro-optic iya kudlala indima ebaluleke ngakumbi kwi-microwave photon, unxibelelwano lwe-optical kunye nezinye iinkalo.