Intshayelelo kwiSakhiwo kunye nokuSebenza kweI-Thin Film Lithium Niobate Electro optic Modulator
An i-electro-optic modulatorngokusekelwe kwizakhiwo ezahlukeneyo, ubude bamaza, kunye namaqonga efilimu encinci ye-lithium niobate, kunye nothelekiso olupheleleyo lokusebenza kweentlobo ezahlukeneyo zeIimodulators ze-EOMkunye nohlalutyo lophando kunye nokusetyenziswaii-modulators ze-lithium niobate zefilimu encincikwezinye iindawo.
1. I-modulator ye-lithium niobate engaguqukiyo
Olu hlobo lwe-modulator lusekelwe kwisiphumo esihle kakhulu se-electro-optic se-lithium niobate crystal kwaye sisixhobo esibalulekileyo sokufikelela kunxibelelwano lwe-optical olukhawulezayo nolukude. Kukho izakhiwo ezintathu eziphambili:
1.1 I-electrode ye-wave ehambahambayo ye-MZI modulator: Le yeyona modeli iqhelekileyo. Iqela lophando le-Lon č ar kwiYunivesithi yaseHarvard laqala ukufumana inguqulelo yokusebenza okuphezulu ngo-2018, kunye nophuculo olulandelayo oluquka ukulayisha okunamandla okusekwe kwi-quartz substrates (i-bandwidth ephezulu kodwa engahambelaniyo ne-silicon-based) kunye ne-silicon-based compatible esekwe kwi-substrate hollowing, ukufikelela kwi-bandwidth ephezulu (>67 GHz) kunye nesignali yesantya esiphezulu (njenge-112 Gbit/s PAM4).
1.2 I-Folding MZI modulator: Ukuze kufinyezwe ubungakanani besixhobo kwaye kuhlengahlengiswe kwiimodyuli ezincinci ezifana ne-QSFP-DD, unyango lwe-polarization, i-cross waveguide okanye i-inverted microstructure electrodes zisetyenziselwa ukunciphisa ubude besixhobo ngesiqingatha kunye nokufezekisa i-bandwidth ye-60 GHz.
1.3 I-Modulator ye-Single/Dual Polarization Coherent Orthogonal (IQ): Isebenzisa ifomathi ye-modulation ephezulu ukuphucula izinga lokudlulisela. Iqela lophando leCai kwiYunivesithi yaseSun Yat sen lifumene i-modulator yokuqala ye-IQ polarization single on-chip ngo-2020. I-modulator ye-IQ polarization ephindwe kabini eyenziwe kwixesha elizayo isebenza ngcono, kwaye inguqulelo esekelwe kwi-quartz substrate imisele irekhodi yezinga lokudlulisela ubude be-1.96 Tbit/s.
2. I-modulator ye-lithium niobate ye-resonant cavity type thin-film
Ukuze kufezekiswe ii-modulators ze-bandwidth ezincinci nezinkulu kakhulu, kukho izakhiwo ezahlukeneyo ze-resonant cavity ezikhoyo:
2.1I-Photonic crystal (PC) kunye ne-micro ring modulator: Iqela lophando likaLin kwiYunivesithi yaseRochester liphuhlise i-photonic crystal modulator yokuqala esebenza kakhulu. Ukongeza, ii-micro ring modulators ezisekelwe kwi-silicon lithium niobate heterogeneous integration kunye ne-homogeneous integration nazo ziye zacetyiswa, zafikelela kwii-bandwidths ze-GHz ezininzi.
2.2 Imodulator ye-resonant cavity ye-Bragg grating: kuquka i-Fabry Perot (FP) cavity, i-waveguide Bragg grating (WBG), kunye ne-slow light (SL) modulator. Ezi zakhiwo zenzelwe ukulinganisela ubungakanani, ukunyamezelana kwenkqubo, kunye nokusebenza, umzekelo, i-2 × 2 FP resonant cavity modulator ifikelela kwi-bandwidth enkulu kakhulu edlula i-110 GHz. Imodulator ye-slow light esekelwe kwi-Bragg grating edibeneyo yandisa uluhlu lwe-bandwidth olusebenzayo.
3. I-modulator ye-lithium niobate edibeneyo enefilimu encinci edibeneyo
Kukho iindlela ezintathu eziphambili zokudibanisa ukuhambelana kwetekhnoloji ye-CMOS kumaqonga asekelwe kwi-silicon kunye nokusebenza kakuhle kokuguqulwa kwe-lithium niobate:
3.1 Uhlobo lwebhondi olungafaniyo: Ngokudibanisa ngokuthe ngqo ne-benzocyclobutene (BCB) okanye i-silicon dioxide, i-thin film lithium niobate idluliselwa kwiqonga le-silicon okanye le-silicon nitride, ifikelele kwinqanaba le-wafer, ukuhlanganiswa okuzinzileyo kobushushu obuphezulu. I-modulator ibonisa i-bandwidth ephezulu (>70 GHz, ide idlule i-110 GHz) kunye nokukwazi ukudlulisa isignali ngesantya esiphezulu.
3.2 Ukuhlanganiswa kwezinto ze-waveguide zokubeka indawo ezahlukeneyo: ukufaka i-silicon okanye i-silicon nitride kwi-thin film lithium niobate njenge-load waveguide kukwafezekisa i-electro-optic modulation esebenzayo.
3.3 Ukudibanisa okuhlukeneyo kokuprinta okugqithisileyo kweMicro (μ TP): Le yiteknoloji ekulindeleke ukuba isetyenziswe kwimveliso enkulu, edlulisela izixhobo ezisebenzayo ezilungiselelwe kwangaphambili ukuya kwiitships ezijolise kwiitships ngezixhobo ezichanekileyo, ziphepha ukucubungula okuntsonkothileyo emva koko. Isetyenziswe ngempumelelo kwiiplatifomu ze-silicon nitride kunye ne-silicon-based, ifikelela kwi-bandwidths yamashumi e-GHz.
Ngamafutshane, eli nqaku lichaza ngokucwangcisiweyo indlela yetekhnoloji yee-electro-optic modulators ezisekelwe kwiiplatifomu ze-thin film lithium niobate, ukusuka ekulandeleni izakhiwo ze-high-performance kunye ne-bandwidth enkulu ye-non resonant cavity, ukuhlola izakhiwo ze-miniaturized resonant cavity, kunye nokudibanisa namaqonga e-photonic avuthiweyo asekelwe kwi-silicon. Libonisa amandla amakhulu kunye nenkqubela phambili eqhubekayo yee-thin film lithium niobate modulators ekugqitheni kwimida yokusebenza yee-modulators zemveli kunye nokufikelela kunxibelelwano lwe-optical olukhawulezayo.
Ixesha leposi: Matshi 31-2026