Ukusebenza okuphezulu kwe-ultrafast waferiteknoloji laser
Amandla phezululasers ultrafastzisetyenziswa ngokubanzi kwimveliso ephucukileyo, ulwazi, i-microelectronics, i-biomedicine, ukhuselo lwesizwe kunye nemimandla yezomkhosi, kwaye uphando lwezenzululwazi olufanelekileyo lubalulekile ekukhuthazeni ukusungulwa kwenzululwazi kunye nobuchwepheshe belizwe kunye nophuhliso olukumgangatho ophezulu. Iqhekeza elincinciinkqubo laserkunye nezibonelelo zayo zamandla aphezulu aphezulu, amandla amakhulu e-pulse kunye nomgangatho obalaseleyo we-beam inemfuno enkulu kwi-attosecond fiziksi, ukusetyenzwa kwezinto kunye nezinye iindawo zenzululwazi kunye nezoshishino, kwaye ixhatshazwe ngokubanzi ngamazwe ngamazwe ngamazwe.
Kutshanje, iqela lophando e-China lisebenzise imodyuli ye-wafer eyaphuhliswayo kunye netekhnoloji yokukhulisa ukukhulisa itekhnoloji ukufezekisa ukusebenza okuphezulu (uzinzo oluphezulu, amandla aphezulu, umgangatho ophezulu we-beam, ukusebenza okuphezulu) i-wafer ekhawulezayolaserimveliso. Ngokuyila ukuhlaziya umgodi we-amplifier kunye nokulawulwa kobushushu bomphezulu kunye nokuzinza komatshini wekristale yediski kwi-cavity, ukuphuma kwe-laser ye-pulse eyodwa yamandla> 300 μJ, ububanzi be-pulse <7 ps, amandla aphakathi> 150 W iphunyeziwe. , kunye neyona ndlela iphezulu yokuguqula ukukhanya ukuya ekukhanyeni ingafikelela kwi-61%, ekwayeyona ndlela iphezulu yokuguqulwa kwe-optical echazwe ngoku. I-beam quality factor M2<1.06@150W, 8h uzinzo RMS<0.33%, le mpumelelo ibonisa inkqubela phambili ebalulekileyo kwi-high-performance ultrafast wafer laser, eya kubonelela ngamathuba amaninzi kwizicelo ze-laser ultrafast.
Ukuphindaphinda okuphindaphindiweyo, inkqubo yokukhulisa amandla e-wafer yamandla aphezulu
Ubume be-wafer laser amplifier iboniswe kuMzobo 1. Ibandakanya umthombo wembewu yefiber, intloko yelaser yesilayi esibhityileyo kunye nomgodi ovuselelayo weamplifier. I-fiber oscillator ye-ytterbium-doped ene-avareji yamandla e-15 mW, i-wavelength ephakathi kwe-1030 nm, i-pulse wide ye-7.1 ps kunye nesantya sokuphindaphinda kwe-30 MHz isetyenziswe njengomthombo wembewu. Intloko ye-laser ye-wafer isebenzisa i-Yb yasekhaya: ikristale ye-YAG enobubanzi be-8.8 mm kunye nobukhulu be-150 µm kunye ne-48-stroke system pumping. Umthombo wempompo usebenzisa umgca we-zero-phonon LD kunye ne-969 nm lock wavelength, okunciphisa i-quantum defect kwi-5.8%. Isakhiwo esikhethekileyo sokupholisa sinokupholisa ngokufanelekileyo i-crystal crystal kwaye siqinisekise ukuzinza kwendawo yokuvuselela. I-cavity yokuvuselela i-amplifying cavity iqukethe iiseli ze-Pockels (i-PC), i-Thin Film Polarizers (TFP), i-Quarter-Wave Plates (QWP) kunye ne-resonator ephezulu. Ii-isolators zisetyenziselwa ukuthintela ukukhanya okukhutshiweyo ekubuyiseleni umva umthombo wembewu. Isakhiwo se-isolator esiquka i-TFP1, i-Rotator kunye ne-Half-Wave Plates (HWP) isetyenziselwa ukwahlula imbewu yegalelo kunye ne-pulses amplified. I-pulse yembewu ingena kwigumbi lokukhulisa ngokutsha nge-TFP2. I-Barium metaborate (BBO) iikristale, i-PC, kunye ne-QWP zidibanisa ukwenza i-optical switch esebenzisa i-voltage ephezulu ngamaxesha kwi-PC ukuze ibambe ngokukhethiweyo i-pulse yembewu kwaye iyisasaze ngasemva naphambili kwi-cavity. I-pulse efunwayo i-oscillates kwi-cavity kwaye ikhuliswe ngokufanelekileyo ngexesha lokusasazwa kohambo olujikelezayo ngokulungelelanisa kakuhle ixesha loxinzelelo lwebhokisi.
I-wafer regeneration amplifier ibonisa ukusebenza kakuhle kwemveliso kwaye iya kudlala indima ebalulekileyo kwiindawo eziphezulu zokuvelisa ezifana ne-ultraviolet lithography egqithisileyo, umthombo wempompo ye-attosecond, i-elektroniki ye-3C, kunye nezithuthi zamandla amatsha. Kwangaxeshanye, itekhnoloji ye-laser ye-wafer kulindeleke ukuba isetyenziswe kumandla amakhulu kakhuluizixhobo laser, ukubonelela ngeendlela ezintsha zokuvavanya ukubunjwa kunye nokufunyanwa kakuhle kwezinto kwi-nanoscale space scale kunye ne-femtosecond time scale. Ngenjongo yokukhonza iimfuno eziphambili zelizwe, iqela leprojekthi liya kuqhubeka nokugxila kwi-laser technology innovation, ikhefu ngakumbi kumalungiselelo eekristale ze-laser ezinamandla aphezulu, kunye nokuphucula ngokufanelekileyo uphando oluzimeleyo kunye nophuhliso lwesakhono sezixhobo ze-laser. imimandla yolwazi, amandla, izixhobo eziphezulu kunye nokunye.
Ixesha lokuposa: May-28-2024