Izinto eziluncedo kunye nokubaluleka kwefilimu ebhityileyo i-lithium niobate kwitekhnoloji edibeneyo ye-microwave photon
Itekhnoloji yefoton yeMicrowaveineenzuzo zebhanwidth enkulu yokusebenza, isakhono esinamandla sokucutshungulwa ngokunxuseneyo kunye nelahleko ephantsi yothumelo, enesakhono sokuphula ibhotile yobugcisa benkqubo ye-microwave yemveli kunye nokuphucula ukusebenza kwezixhobo zolwazi zomkhosi zombane ezifana nerada, imfazwe yombane, unxibelelwano kunye nomlinganiselo kunye nolawulo. Nangona kunjalo, inkqubo yefoton ye-microwave esekwe kwizixhobo ezicacileyo ineengxaki ezithile ezifana nomthamo omkhulu, ubunzima obunzima kunye nozinzo olulambathayo, oluthintela ngokunzulu ukusetyenziswa kobuchwepheshe be-microwave photon kumaqonga asemkhathini kunye nasemoyeni. Ke ngoko, itekhnoloji yefoton ye-microwave ehlanganisiweyo iba yinkxaso ebalulekileyo yokwaphula usetyenziso lwefoton ye-microwave kwinkqubo yolwazi yombane yomkhosi kwaye inike ukudlala ngokupheleleyo kwiingenelo zobuchwepheshe be-microwave photon.
Okwangoku, itekhnoloji ye-SI-based photonic integration technology kunye ne-INP-based photonic integration technology iye yakhula ngakumbi emva kweminyaka yophuhliso kwinkalo yonxibelelwano lwe-optical, kwaye zininzi iimveliso ezifakwe kwimarike. Nangona kunjalo, ekusebenziseni i-microwave photon, kukho iingxaki kwezi ntlobo ezimbini zeteknoloji yokudibanisa i-photon: umzekelo, i-coefficient ye-electro-optical nonlinear ye-Si modulator kunye ne-InP modulator ichasene ne-linearity ephezulu kunye neempawu ezinkulu eziguquguqukayo ezilandelwa yiteknoloji ye-microwave photon; Umzekelo, iswitshi ye-silicon optical eqonda ukutshintsha kwendlela yokubona, nokuba isekwe kwisiphumo se-thermal-optical, i-piezoelectric effect, okanye i-carrier injection dispersion effect, ineengxaki zesantya sokutshintsha okucothayo, ukusetyenziswa kwamandla kunye nokusetyenziswa kobushushu, obungenako ukuhlangabezana nokuskena kwe-beam ekhawulezayo kunye ne-array enkulu ye-microwave photon izicelo.
I-Lithium niobate ibisoloko ilukhetho lokuqala kwisantya esiphezuluukumodareyitha kwe-electro-opticizixhobo ngenxa yempembelelo yayo ebalaseleyo ye-electro-optic. Nangona kunjalo, i-lithium niobate yendabukoimodyuli ye-electro-opticalyenziwe ngezinto ezinkulu ze-lithium niobate crystal, kwaye ubungakanani besixhobo bukhulu kakhulu, obungenako ukukhawulelana neemfuno zetekhnoloji edibeneyo ye-microwave photon. Indlela yokudibanisa izinto ze-lithium niobate kunye ne-linear electro-optical coefficient kwi-microwave edibeneyo ye-teknoloji ye-photon inkqubo ibe yinjongo yabaphandi abafanelekileyo. Ngo-2018, iqela lophando elivela kwiYunivesithi yaseHarvard eUnited States labika okokuqala ngetekhnoloji yokudityaniswa kwefotoni esekwe kwifilimu ebhityileyo i-lithium niobate kwiNdalo, kuba itekhnoloji ineenzuzo zokudityaniswa okuphezulu, i-electro-optical modulation bandwidth, kunye nomgca ophezulu we-electro-optical effect, yakuba iqalisiwe, yabangela ngoko nangoko ingqalelo kwizifundo nakwimizi-mveliso kwicandelo lodibaniso lwefotonic kunye ne-microwave. Ngokwembono yesicelo se-microwave photon, eli phepha liphonononga impembelelo kunye nokubaluleka kobuchwepheshe bokuhlanganiswa kwefotoni esekwe kwifilimu ebhityileyo ye-lithium niobate kuphuhliso lwetekhnoloji ye-microwave photon.
Ifilimu encinci ye-lithium niobate kunye nefilimu encinciimodyuli ye-lithium niobate
Kwiminyaka emibini yakutshanje, kuye kwavela uhlobo olutsha lwezinto ze-lithium niobate, oko kukuthi, ifilimu ye-lithium niobate ikhutshwe kwikristale enkulu ye-lithium niobate ngendlela ye "ion slicing" kwaye ibophelelwe kwi-Si wafer kunye ne-silica buffer layer ukwenza i-LNOI (i-LiNbO3-On-Insulator) ebizwa ngokuba yi-lithium material ebizwa ngokuba yi-lithium ifilimu. I-Ridge waveguides enobude obungaphezulu kwe-nanometers ye-100 inokugxilwa kwifilimu ebhityileyo ye-lithium niobate ngenkqubo eyomileyo yokumisa, kunye ne-refractive index ye-refractive index ye-waveguides eyenziweyo inokufikelela ngaphezu kwe-0.8 (iphezulu kakhulu kunomahluko we-refractive index ye-lithium niobate waveguides ye-0.02), njengoko kubonisiwe kwintsimi yokukhanya okucacileyo. ngebala le-microwave xa uyila imodyuli. Ke, kuluncedo ukufezekisa i-voltage esezantsi yesiqingatha-amaza kunye ne-bandwidth enkulu yokumodareyitha kubude obufutshane.
Imbonakalo yelahleko ephantsi ye-lithium niobate i-submicron waveguide yophula ibhotile ye-voltage ephezulu yokuqhuba ye-lithium niobate electro-optic modulator. Izithuba ze-electrode zingancitshiswa zibe ~ 5 μm, kwaye ukugqithelana phakathi kwentsimi yombane kunye nentsimi ye-optical mode yanda kakhulu, kwaye i-vπ · L iyancipha ukusuka ngaphezu kwe-20 V · cm ukuya ngaphantsi kwe-2.8 V · cm. Ke ngoko, phantsi kombane ofanayo wesiqingatha-amaza, ubude besixhobo bunokuncitshiswa kakhulu xa kuthelekiswa nemodyuli yemveli. Kwangaxeshanye, emva kokuphucula iiparamitha zobubanzi, ubukhulu kunye nekhefu le-electrode ehambayo, njengoko kubonisiwe kulo mzobo, imodyuli inokuba namandla okumodareyitha okungaphezulu kwe-100 GHz.
Umzobo.1 (a) ubalo lwendlela yokusasazwa kunye (b) nomfanekiso wecandelo elinqamlezayo le-LN waveguide
Umzobo 2 (a) i-Waveguide kunye nesakhiwo se-electrode kunye (b) ne-coreplate ye-modulator ye-LN
Ukuthelekiswa kweemodyuli zefilimu ezicekethekileyo ze-lithium niobate kunye neemodyuli zentengiso ze-lithium niobate, iimodyuli ezisekwe kwisilicon kunye neemodyuli ze-indium phosphide (InP) kunye nezinye iimodyuli ezikhoyo ezinesantya esiphezulu se-electro-optical, iiparamitha eziphambili zothelekiso ziquka:
(1) Imveliso yobude besiqingatha sobude be-volt (vπ ·L, V·cm), ukulinganisa ukumodareyitha kobuchule bomodareyitha, okukhona kuncinci ixabiso, kokukhona kuphezulu ukumodareyitha ukusebenza kakuhle;
(2) I-3 dB i-modulation bandwidth (GHz), elinganisa impendulo ye-modulator kwi-high-frequency modulation;
(3) Ilahleko yokufaka i-Optical (dB) kwindawo yokumodareyitha. Inokubonwa kwitheyibhile ukuba ifilimu encinci ye-lithium niobate modulator ineenzuzo ezicacileyo kwi-modulation bandwidth, i-half-wave voltage, ilahleko ye-optical interpolation njalo njalo.
I-silicon, njengelitye lembombo le-optoelectronics edibeneyo, sele iphuhlisiwe ngoku, inkqubo ikhulile, i-miniaturization yayo ihambelana nokuhlanganiswa okukhulu kwezixhobo ezisebenzayo / ezingabonakaliyo, kwaye i-modulator yayo iqhutywe ngokubanzi kwaye ifundwe ngokunzulu kwintsimi yonxibelelwano lwe-optical. I-electro-optical modulation mechanism ye-silicon yeyona nto ithwala i-depling-tion, inaliti ye-carrier kunye nokuqokelela kwe-carrier. Phakathi kwabo, i-bandwidth ye-modulator ilungile kunye ne-linear degree carrier depletion mechanism, kodwa ngenxa yokuba i-optical field distribution igqithe kunye ne-non-uniformity yommandla wokunciphisa, esi siphumo siya kwazisa ukuphambuka kwe-second-order ye-nonlinear kunye ne-third-order intermodulation terms of distortion, kunye nefuthe lokufunxa kwe-carrier of the carrier to lead to the amplication, kunye nokuphazamiseka komqondiso.
I-modulator ye-InP ineempembelelo ezibalaseleyo ze-electro-optical, kunye ne-multi-layer quantum well structure inokuqonda i-ultra-high rate kunye ne-low drive modulators yombane kunye ne-Vπ · L ukuya kwi-0.156V · mm. Nangona kunjalo, ukuhluka kwesalathisi se-refractive kunye nentsimi yombane kubandakanya imigqaliselo yomgca kunye neyokungahambelani, kwaye ukwanda kombane wombane kuya kwenza umphumo wesibini uvelele. Ke ngoko, isilicon kunye ne-InP electro-optic modulators kufuneka zisebenzise i-bias ukwenza i-pn junction xa zisebenza, kwaye i-pn junction iya kuzisa ilahleko yokufunxa ekukhanyeni. Nangona kunjalo, ubungakanani bemodyuli yezi zimbini zincinci, ubungakanani bemodyuli ye-InP yorhwebo yi-1/4 yemodyuli ye-LN. Ukusebenza kakuhle kokumodareyitha, kukulungele ukuxinana okuphezulu kunye nomgama omfutshane uthungelwano lwedijithali lwe-optical transmission network ezifana namaziko edatha. Impembelelo ye-electro-optical ye-lithium niobate ayinayo indlela yokufunxa ukukhanya kunye nelahleko ephantsi, efanelekileyo kumgama omde ohambelanayo.unxibelelwano lwamehlongomthamo omkhulu kunye nezinga eliphezulu. Kwisicelo se-microwave photon, i-electro-optical coefficients ye-Si kunye ne-InP ayinayo i-nonlinear, engafanelekanga kwi-microwave photon system eqhuba umgca ophezulu kunye ne-dynamics enkulu. Izinto ze-lithium niobate zifanelekile kakhulu kwisicelo se-microwave photon ngenxa ye-coefficient yayo ye-electro-optic modulation coefficient.
Ixesha lokuposa: Apr-22-2024