Inkqubo yempahla ye-Photonic integrated circuit (PIC).

Inkqubo yempahla ye-Photonic integrated circuit (PIC).

I-Silicon photonics luqeqesho olusebenzisa izakhiwo ezicwangcisiweyo ezisekelwe kwizinto ze-silicon ukuqondisa ukukhanya ukufezekisa imisebenzi eyahlukeneyo. Sigxile apha ekusetyenzisweni kwe-silicon photonics ekudaleni ii-transmitters kunye nabamkeli bonxibelelwano lwefiber optic. Njengoko imfuneko yokongezwa ngakumbi kwi-bandwidth enikiweyo, unyawo olunikiweyo, kunye neendleko ezinikiweyo zonyuka, i-silicon photonics iba namandla ngakumbi kwezoqoqosho. Kwinxalenye ye-optical,iteknoloji yokuhlanganisa ifotonickufuneka isetyenziswe, kwaye uninzi lwee-transceivers ezihambelanayo namhlanje zakhiwe kusetyenziswa i-LiNbO3 / iplani ye-wave wave circuit (PLC) modulators kunye nabamkeli be-InP / PLC.

Umzobo 1: Ubonisa iisistim zezinto eziphathekayo ezisetyenziswa ngokuqhelekileyo kwi-photonic integrated circuit (PIC).

Umzobo we-1 ubonisa iinkqubo ze-PIC ezaziwa kakhulu. Ukusuka ekhohlo ukuya ekunene kukho i-silicon-based silica PIC (ekwabizwa ngokuba yi-PLC), i-silicon-based insulator PIC (i-silicon photonics), i-lithium niobate (i-LiNbO3), kunye ne-III-V yeqela le-PIC, njenge-InP kunye ne-GaAs. Eli phepha ligxile kwi-silicon-based photonics. KwiIifoto ze-silicon, umqondiso wokukhanya uhamba kakhulu kwi-silicon, ene-gap yebhendi engathanga ngqo ye-1.12 electron volts (ene-wavelength ye-1.1 microns). I-silicon ikhuliswe ngendlela yeekristale ezicocekileyo kwiziko kwaye emva koko isikwe kwii-wafers, namhlanje eziqhelekileyo ziyi-300 mm ububanzi. Umphezulu we-wafer oxidized ukwenza umaleko we-silica. Enye yeewafers iqhunyiswa ngeeathom zehydrogen ukuya kubunzulu obuthile. Ezi ziqwenga zimbini ke zidityaniswe kwi-vacuum kwaye iileyiti zazo ze-oxide zibophene omnye komnye. Indibano iqhawuka ecaleni komgca we-hydrogen ion implantation. Umaleko we-silicon kwindawo yokuqhekeka emva koko ugudiswe, ekugqibeleni ushiye umaleko obhityileyo we-crystalline Si ngaphezulu kwe-silicon ecocekileyo "yokuphatha" ngaphezulu komgangatho wesilica. Izikhokelo zamaza zenziwe ukusuka kolu maleko obhityileyo wekristale. Ngelixa ezi ziqwenga ze-silicon-based insulator (SOI) zenza ilahleko ephantsi ye-silicon photonics waveguides ibenokwenzeka, eneneni iqhele ukusetyenziswa kwiisekethe ze-CMOS ezinamandla aphantsi ngenxa yokuvuza okuphantsi kwangoku abakubonelelayo.

Kukho iindlela ezininzi ezinokwenzeka ze-silicon-based optical waveguides, njengoko kuboniswe kuMfanekiso 2. Zivela kwi-microscale germanium-doped silica waveguides ukuya kwi-nanoscale Silicon Wire waveguides. Ngokudibanisa i-germanium, kunokwenzeka ukwenzaii-photodetectorskunye nokufunxwa kombaneiimodyuli, kwaye mhlawumbi nezandisi zokwandisa amehlo. Ngokusebenzisa i-silicon, iimodyuli yokubonainokwenziwa. Emazantsi ukusuka ekhohlo ukuya ekunene zezi: isilicon wire waveguide, silicon nitride waveguide, silicon oxynitride waveguide, thick silicon ridge waveguide, thin silicon nitride waveguide and doped silicon waveguide. Phezulu, ukusuka ekhohlo ukuya ekunene, ziimodyuli zokuncipha, iifotodetectors zegermanium, kunye negermanium.iiamplifiers zamehlo.

Umzobo 2: I-Cross-section ye-silicon-based optical waveguide series, ebonisa ilahleko eqhelekileyo yokusabalalisa kunye ne-refractive indices.